E-beam Evaporator System

Model Number

EE-MPA5000

Features

EE-MPA system is industrial equipment for Mobile Phone Window Coating. Also, Our EE-MPA series is included Ion Source(cleaning) and Thermal evaporation(waterproof) pretreatment make the high quality coating before Evaporation.

Application

• Various Metal(Al, Ni, Ti etc.) & Alloy
• Oxide(SiO2, TiO2, etc)
• Mobile Phone Window Coating

Specifications

• Internal Dimension : 2050mm Dia. 1900(H)
• E-Beam Gun
  - 180° Deflection, 10KW(220V, 50/60Hz)
  - X-Y Sweeper & remote control
  - 25cc x 12Pocket(Motor Drive)
• Ion Gun
  - 140mm dia. 150mm(H)
  - DC 4KW(220V, 50/60Hz)
  - Pretreatment and Ion assistant
• Heating Unit
  - Halogen Lamp Heater
  - Max. Temperature
  - 300°C(on the surface)
  - Auto PID Control
• Multi-thickness Rate Controller and Crystal Sensor(Gold coating type)
• Rotating Dome
  0~20 RPM(Low, High, Reverse speed Setting) Motor + Inverter Control
• Sample Capacity : 40Sheet(275mm x 200mm), Max. 80Sheet(Option)
• Base Pressure : Less 3 x 10^-5 Torr within 10min.
• Full Automation System : PLC Based Touch Panel(17" Color)