Hybrid Coating System

Model Number

SAHS 5000 Series

Application

• Metal coating(Al, Ag, Sn, SUS, etc.)
• Sputter & Arc Multi layer Coating Available
• TiN, CrN, AIN for Hard Coating

Specifications

• Sample Capacity : Phone Size case Max. 540ea
• Circular Type Magnetron Sputtering & Arc Ion Plating
  : Target Material – Various Metal(Cr, Ti, Al, Cu etc.)
  : Dimension : 4" Target Sputter Source 11sets / 4" Target Arc source 7sets
• Rectangular Type Ion Beam Source : DC(5KW)
• High Vacuum Pumping System(Rotary + Booster + Diffusion Pump)
• Ultimate Pressure : Process Chamber 5 x 10-6 Torr within 3min
• Heating Temperature : Max. 350°C
• Jig Rotation(Independently RPM Control of Rotation and Revolution)
  : AC motor control with inverter
  : Roller & Shaft inside Chamber
  : RPM control Available(RPM : 5~30)
  : Jig isolation module for Bias
• Power Processing
• Full Automation Control System Using PC or PLC Based Touch Panel(Optional Item)