Large Area Rapid Thermal Annealing System

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SNTEK Co., Ltd.
[Korea]

Address:
906 Hakwoon-ri, Yangchon-myon, Gimpo-si Gyeonggi-do 415-843 Korea

Phone:
82-31-9891573

Contact name:
gill -seon ,Ahn , Assistant Manager

Products

	Large Area Rapid Thermal Annealing System

Large Area Rapid Thermal Annealing System

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Model Number

LRS 5000 Series

Features

LRS5000 system is batch-production equipment that supports annealing process the quality control and large-scale production are possible. The high reliability assures low cost of ownership.

Specification

Square Chamber(internal size : 660mm x 660mm x 150mm)
- cold wall & contamination free
Sample Capacity : 125mm x 125mm x 16PCS, 156mm x 9PCS
Maximum Temperature : 1200°C
Process Temperature Range : 300~1100°C
Sustain Time : More than 2min. at 1100°C
Limping Rate : 10 to 20°C / sec
Cooling Rate : 5 to 10°C / sec
Heating Uniformity : Less than < ±10%(530mm x 530mm Area)
Gas mixing capability with MFC
Automation System using PC interface(option)
Atmospheric & Vacuum Process are Possible.